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Microelectromechanical Systems Laboratory

The Lab consists of two areas: a Class 1000 cleanroom with photolithography and wet etching capability; and a polymer MEMS area that focuses on fabricating and testing of poly(dimethylsiloxane) (PDMS) based microdevices using soft lithography.

Integration of microfabrication technology with biology and medicine is producing a large array of BioMEMS devices that could revolutionize the biomedical investigation and clinical practice. The BioMEMS and Microfabrication Lab has been used to train students with hands-on micro and nano fabrication skills, as well as to provide research opportunities for students interested in interdisciplinary BioMEMS projects.