Introduction to MEMS

BME4203

Introduction to MEMS

College of Engineering
BIOM
"This course provides an introduction to the theory and principles of the microelectromechanical systems (MEMS). Topics include material properties, microfabrication techniques, sensing and actuation principles, and packaging and testing issues. Application of MEMS will be discussed with a focus on biomedical problems including drug delivery, genomics, cell patterning and tissue organization. Students will form teams to fabricate and evaluate microdevices in the newly established BioMEMS lab, and gain a deep understanding of the engineering principles and fundamental challenges in designing Microsystems for biomedical applications."